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abe haruhiko
1:Phd physics @Kyoto Unvesity 2;30yaers @Mitsubishi LSI Lab;(DRAM process) 3;pioneer of Plasma etching Process(Dry process) 4 many papers @IEDM etc 5some AWARDs was presented; SSDM etc
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abe haruhiko
1:Phd physics @Kyoto Unvesity 2;30yaers @Mitsubishi LSI Lab;(DRAM process) 3;pioneer of Plasma etching Process(Dry process) 4 many papers @IEDM etc 5some AWARDs was presented; SSDM etc
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